Product description:

Typical application


Semiconductor lithography

Semiconductor lithography
Development mask work

Weisiman HTEM high voltage power supply voltage power supply is mainly used for precision electron beam Nano-lithography applications such as semiconductor, micro-optics. It's super low ripple and excellent stability make it ideal for use in demanding applications. Solid high voltage parts of the package to remove any user maintenance, digital control, over voltage, over current, arc protection.

Input voltage:
Single phase 220VAC ±, 50/60HZ
Output voltage: 0-100KV of a negative. EXTER is switch selectable
105kV, ± 500 volts
Output current:
ΜA, low range
0-100 μA, high range
Switch selectable
Linear regulation: the specified input rated voltage ± 0.001% voltage range
Load regulation: ≤ 20V is available from 25 μ a 60 μA of current changes and 60 μA to 25 μ a
75mV peak
Local high-voltage discharge: greater than 200mV
Stability: 0.001% every 8 hours, 6 hours of war m, highest temperature of 20 ° c ± 0.2 ° c.
Temperature coefficient:
Each degree Celsius 50ppm, more than 10 ° c to 40 ° c range
The environment:
Operating temperature: 0-40 c
Storage temperature:-40-85 degrees Celsius
Humidity: 10% to 90%RH, non-condensing
Cooling method:
Forced ventilation control chassis;
Convection-cooled high pressure chassis

Information about weisiman and its more high-voltage products, please call 086-029-33693480 or visit their Web site:

Weisiman high voltage power supplies Ltd is the world's leading high voltage DC power supply and integration of x-ray source suppliers, while providing standardized products and custom design services. Products are widely used in medical, industrial, semiconductors, security, analytical instruments, laboratory, and undersea fibre-optic equipment. Design, production and service of factories in the United States, United Kingdom, and China, and sales centers located in Europe, North America and Asia, we will be happy to serve you!