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Scanning transmission electron microscopy
scanning electron microscope
Semiconductor analysis, processing and repair
Ion Beam Etching
Focused ion beam lithography
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Electron Microscope Technology definitions
Scanning electron microscopy TEM electron microscopy are commonly used (transmissionelectronmicroscope, TEM) and scanning electron microscopy (scanningelectronmicroscope, SEM). Compared with the light microscope electron microscope with an electron beam instead of visible light, instead of using the electromagnetic lens using an optical lens and the phosphor screen to the naked eye invisible electron beam imaging. Compared with the light microscope electron microscope with an electron beam instead of visible light, electromagnetic lens instead of the optical lens and the screen will be invisible using an electron beam imaging.
Scanning electron microscopy (SEM Scanning electron microscope) of the electron beam does not pass through the sample, only try to focus the electron beams in a small area of the sample, then the sample is scanned line by line. Incident electron is excited sample surface leads to a secondary electron The microscope observation of each of these points is scattered electrons out, placed next to the scintillation crystal sample receiving these secondary electrons, amplified by the electron beam intensity modulation tube, thereby changing the brightness on the CRT screen. CRT deflection coil and the electron beam on the sample surface to maintain synchronous scanning, such CRT screen on topography image shows the sample surface, which is similar to the television industry works phase. Since this is not necessary transmission electron microscope samples, so the electrons accelerated do not have a very high voltage scanning electron microscope resolution is mainly determined diameter on the sample surface of the electron beam. magnification is on the CRT scan amplitude ratio of scan amplitude of the sample can be continuously varied from a few to hundreds of thousands of times . times do not need to thin sample scanning electron microscope; has a strong three-dimensional image; able to use electron beam interaction with the material produced by secondary electrons, electron and X-ray absorption analysis and other information material composition scanning electron. microscope with an electron gun and a condenser lens of a transmission electron microscope is substantially the same, but in order to make the electron beams finer, in the condenser lens and the microscope added astigmatism elimination device, the objective lens is also equipped with two mutually perpendicular inner scan coils. objective The following sample room equipped can move, rotate and tilt the sample stage.
Field emission scanning electron microscope (FESEM) is a relatively simple scanning electron microscope, it was observed on the sample field emission due to strong electric field caused by the electron comes out. If the observed sample is through a scanning electron then, NA me this kind of microscope is called the scanning transmission electron microscope (Scanning Transmission Electron Microscopy, STEM).
Transmission electron microscope to observe those commonly used in the fine structure of matter with an ordinary microscope can not be resolved; scanning electron microscope is mainly used solid surface morphology can also be combined with X-ray diffraction or electron spectrometer, an electronic microprobe analysis for material composition; emission electron microscopy to study electron emission from the surface.
1926 Hans Bush developed the first magnetic electron lens. 1931 卢斯卡 and Max Ernst Knorr developed the first transmission electron microscope to show that when the microscope is not used in perspective sample, but a metal grid. 1986 卢斯卡 do this to get Nobel Prize in Physics in 1938 at Siemens AG, he developed the first commercial electron microscope. 1934 osmium tetroxide has been proposed to strengthen the image contrast. 1937 The first launch of a scanning transmission electron microscope electron microscope
1. TEM techniques: TEM electron beam is focused through the sample after amplification and was later produced as projected onto photographic film or on a screen resolution of TEM observation 0.1 ~ 0.2nm, magnification. Since the electron scattering or easily absorbed by the object, so low penetrating power, necessary to prepare ultrathin sections thinner (usually 50 ~ 100nm). The preparation procedure is similar to the tens of thousands to several tens of times. with paraffin, but requires very strict. To drawn in a few minutes after the death of the body fishing, tissue blocks to small (less than 1 mm3), commonly used glutaraldehyde and hungry acid resin embedding dual fixed, (ultramicrotome) cut with a special ultra-thin slicer When into thin slices, then by uranyl acetate and lead citrate electronic staining electron beam is projected onto the sample, with the organization may constitute components of different densities corresponding electron emission occurs, such as electron beam onto a massive structure , electrons are scattered more, so small and projected onto an electronic image on the phosphor screen was dark, electronic photos on the black, said electron density (electrondense). On the contrary, it is called the electron density is low (electronlucent).
Using transmission electron microscopy of biological samples before the samples must be pre-treated with the needs of scientists using different research requirements fixing a different approach: in order to try to save the sample as the sample using glutaraldehyde to harden and use osmium tetroxide to stain fat Cold Fixed: samples frozen in liquid ethane, so that the water does not crystallize, and the virus is formed under the electron microscope, the amorphous ice stored samples such damage is relatively small, but the image contrast is very low dry off. : the use of ethanol and acetone to replace the pad into the water: can be split into the mat after the sample is split: the sample using a diamond blade sliced staining: heavy atoms such as lead or uranium atom is higher than the light scattering ability of electrons, thus It can be used to increase the contrast. using transmission electron microscopy before metal samples are to be cut very thin slices (about 0.1 mm), and then continue to make use of electrolytic polished metal thinning, and finally in the sample tend to form a hole in the center, electronic can pass through there very thin metal near the hole. You can not use a metal or non-conductive or poor conductive properties of the material, such as electrolytic polishing method using an ion strike after the general was first worn thin by mechanical means such as silicon continues processing. To prevent non-conductive samples in a scanning electron microscope to accumulate static their surfaces must be covered with a conductive layer to be observed in an electron microscope the sample in a vacuum, and therefore unable to observe living samples. may be generated during sample processing samples that do not have The structure, which exacerbates the difficulty of image analysis thereafter. Since the transmission electron microscope observation of only very thin samples, and conventional optical microscopy is possible with the material surface structure different from the internal structure of the material. Additionally the electron beams may be heated by collisions and destruction of the sample. The latest technology now can be observed in an electron microscope the wet sample and the sample not coated with a conductive layer (ESEM, Environmental Scanning Electron Microscopes, ESEM). If the sample compared to the situation in advance, then it can be substantially clear no damage was observed. Further electron microscope to purchase and maintain prices relatively high.
Image sensor: 1.3 million pixels, color CMOS, Effective Pixels 1280 (H) * 1024 (V) resolution: 650 lines or more image refresh rate: 15 frames / sec SNR:) 60dB Video Interface: standard VGA interface VGA output support : 1024X768 60Hz (default), 1024X768 75Hz Lens Mount: CS control function: Brightness, contrast, color saturation, sharpness, Cb offset, Cr offset crosshairs superimposed, vertical mirror, horizontal mirror, negative power supply: Allow 10% deviation 5V DC Working current: 400mA Power: 2W Volume: 48 * 60 * 100 (mm) Total magnification: 7-150 times Lens: 0.7-4.5 continuous zoom eyepiece: 0.5X lifting range: 270mm hand wheel adjustment focus range: 65mm center distance: 140mm column diameter: 25mm lens mount diameter: 50mm total height of the bracket: 355mm Base Dimensions: 390X270X28 Weight:. 6KG 8-inch industrial LCD monitor magnification of the microscope as needed can be 600 times the maximum observed area can be reach more than 30mm, easy to use features optional items:. XY mobile platform, LED ring light, 1X, 0.3 times 0.5 times the eyepiece, 2x objective lens, the base has a variety of options, it can be equipped with a variety of cameras.