Product description:

typical application

Electron beam lithography

Semiconductor Inspection

scanning electron microscope

Electron-Beam Lithography
Semiconductor Inspection
Scanning Electron Microscopes

EGM is a high voltage power supply 威思曼 high stability and low ripple high voltage electron gun power, EGM suspended filament power supply and integrated active bias power, all-digital monitoring and control. Overvoltage, overcurrent, arcing protection.


Beam energy
Output voltage: -50kv-0 adjustable (Other output voltages available upon request).

Output Current: 500μA maximum.

Voltage Regulation: (10 ppm input change 10%

Current regulation: (10 ppm

Stability: (2.0ppm / 48 小时 / 0.5 ° C

Warm-up time: 5 hours complete stability.

Ripple and noise: (2.5ppm.

Filament power
Maximum power: 10W, maximum current 2A, the maximum voltage of 10V
Voltage Regulation: (10 ppm input change 10%

Current regulation: the possibility of a 5% power change (4-7 watts (1 Euro -7 Euro)

Drift: (50ppm / 12 小时 / 0.5 ° C after warm-up

Preheat: (3 hours complete stability

Ripple and noise: (0.1% (operating frequency), (50ppm (10 到 3kHz)
+ 1.00V equal to 10W
Stability: 100ppm
Accuracy: 0.5%

Active bias

Voltage range:

Low: --200-1100 reference filament center tap

High: - No. 200 -2000 filament center tap

Temperature coefficient: (100 ppm / ° C

Emission control: 0 to 500μA


Stability of 100 ppm

0.1% accuracy

Input: AC90-265V 47Hz to 63Hz
Temperature: Temperature: 20 ° C to 25 ° C Storage temperature:. -10 ° C to 70 ° C.
Humidity: 10 to 70% non-condensing.

Wei Siman high voltage products and more information, please call 086-029-33693480 or visit their website:

Wei Siman high voltage Power Co., Ltd. is a world leader with a DC high voltage power supply and integration of the X-ray source supplier, while providing standardized products and custom design services. Our products are widely used in medical, industrial, semiconductor, security, analytical instruments, laboratory and submarine fiber optic equipment. Set design, production and service as one of the factories located in the United States, Britain, and China and other places, and we sales centers throughout Europe, North America and Asia, we will be happy to serve you!