Product description:

typical application


Semiconductor lithography

Semiconductor lithography
Development mask work

Wei Siman HTEM high voltage power supply high voltage power supply is mainly used for precision applications such as semiconductor nano electron beam lithography, micro-optics. It's ultra low ripple and excellent stability makes it suitable for use in these demanding applications. The solid encapsulated high voltage Part eliminate any maintenance problems of users, digital control, overvoltage, overcurrent, arcing protection.

Input voltage:
Single-phase 220VAC, ± 10%, 50 / 60HZ
Output voltage:. 0-100KV, negative EXTER shall be switch selectable
To 105kV, ± 500 volts
Output current:
0 -10μA, low range
0-100μA, high-range
Switch selectable
Line regulation: The specified input rated voltage ± 0.001%, the voltage range
Load regulation: ≤20V of current change 25μA to 60μA and 60μA to 25μA
≤75mV peak to peak
Local high-voltage discharge: greater than 200mV or less
Stability: 0.001%, every 8 hours, 6 hours war m, the highest temperature of 20 ° C ± 0.2 ° C.
Temperature coefficient:
Per degree Celsius 50ppm, 超过 10 ° C to 40 ° C within the range
Operating temperature: 0-40 degrees Celsius
Storage temperature: -40 to 85 degrees Celsius
Humidity: 10% to 90% RH, non-condensing
cooling method:
Forced ventilation control cabinet;
Convection cooled high voltage enclosures

Wei Siman high voltage products and more information, please call 086-029-33693480 or visit their website:

Wei Siman high voltage Power Co., Ltd. is a world leader with a DC high voltage power supply and integration of the X-ray source supplier, while providing standardized products and custom design services. Our products are widely used in medical, industrial, semiconductor, security, analytical instruments, laboratory and submarine fiber optic equipment. Set design, production and service as one of the factories located in the United States, Britain, and China and other places, and we sales centers throughout Europe, North America and Asia, we will be happy to serve you!